Preparation of organic soluble polyimides and their applications in KrF excimer laser LIGA process

Macromolecular Chemistry and Physics

Volumn 202, Issue 11, 2001, Pages 2394-2401

  Hsieh, Yu Sheng ^a   Yang, Chii Rong ^b   Hwang, Guang Yeu ^a   Lee, Yu Der ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIMETHYL SULFOXIDE; FLUORIDE; POLYIMIDE;

ACCURACY; ARTICLE; CHEMICAL ANALYSIS; CHEMICAL STRUCTURE; EXCIMER LASER; KRYPTON LASER; ORGANIC CHEMISTRY; SCANNING ELECTRON MICROSCOPY; SOLUBILITY; THERMOSTABILITY;

EID: 0035806879     PISSN: 10221352     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3935(20010701)202:11<2394::AID-MACP2394>3.0.CO;2-K     Document Type: Article

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