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Volumn 63, Issue 1-2, 2001, Pages 119-126
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Influence of depth resolution on the interdiffusion data in thin film bilayer and multilayer Ag/Pd structures
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Author keywords
Auger eletron spectroscopy; Depth profiles; Depth resolution; Interdiffusion
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
COPPER;
DEPOSITION;
GOLD;
METALLIC FILMS;
MULTILAYERS;
PALLADIUM;
SILICA;
SUBSTRATES;
THIN FILMS;
DEPTH PROFILING;
INTERDIFFUSION (SOLIDS);
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EID: 0035797026
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0042-207X(01)00179-8 Document Type: Conference Paper |
Times cited : (7)
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References (26)
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