Effect of catalyst on growth behavior of carbon nanotubes synthesized by microwave heating thermal CVD process

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 2001, Pages 61-62

  Chou, Y ^a   Chou, C S ^a   Huang, J H ^a   Lin, I N ^a   Cheng, H F ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST ACTIVITY; COMPOSITION EFFECTS; CURRENT DENSITY; ELECTRON EMISSION; METHANOL; MICROWAVE HEATING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR GROWTH;

MICROWAVE ENHANCED PLASMA CHEMICAL VAPOR DEPOSITION; PLASMA REDUCTION; PRETREATMENT PROCESS;

CARBON NANOTUBES;

EID: 0035784553     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. S. Iijima, Nature 354, 56 (1991).
2. D.S. Bethune et al., Nature 363, 605 (1993).
3. W.A. de Heer et al., Adv. Mater. 9, 87 (1997).
4. G. Nagy et al., Appl. Phys. Lett. 73, 529 (1998).