Study of gas sensor with carbon nanotube film on the substrate of porous silicon

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 2001, Pages 13-14

  Zhang, Yong ^a   Liu, Junhua ^a   Li, Xin ^a   Dou, Juying ^a   Liu, Weihua ^a   He, Yongning ^a   Zhu, Changchun ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CARBON NANOTUBES; CATHODES; ELECTRIC CONDUCTANCE; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; POROUS SILICON; REACTIVE ION ETCHING; SEMICONDUCTOR DEVICES; SUBSTRATES; THERMAL EFFECTS;

HIGH ELECTRIC FIELD; HYDROTHERMAL IRON ION ETCHING; PYROGENATION; SELF-SUSTAINING DARK DISCHARGE VOLTAGE;

CHEMICAL SENSORS;

EID: 0035784260     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Dai Pinghu, Ling Baoming. Study of A New Gas Sensor Based on Electrical Conductance of Gases in A High Electrical Field. Chinese Journal Of Scientific Instrument, Vol.19, No.3, 1998.
2. Li Xinjian, Zhu Deliang, Chen Qianwang, Zhang Yuheng. Strong And Nondegrading Luminescent Porous Silicon Prepared By Hydrothermal Etching, Applied Physics Letters, Vol.74, No.3, 1999.