Copper sputtering by power ion beam: Structure and phase composition of the target and film

Fizika i Khimiya Obrabotki Materialov

Volumn , Issue 1, 2001, Pages 24-30

  Ivanov, Yu F ^a   Remnev, G E ^a   Zakutaev, A N ^a   Matvienko, V M ^a   Potemkin, A V ^a  

^a NATIONAL RESEARCH TOMSK POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; COPPER METALLOGRAPHY; PHASE TRANSITIONS; POLYCRYSTALLINE MATERIALS; SPUTTERING; THIN FILMS;

HIGH-POWER ION BEAMS; OPTICAL METALLOGRAPHY;

ION BEAMS;

EID: 0035778151     PISSN: 00153214     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)