Simulation and optimization of a micromachined gyroscope using high-aspect-ratio micromachining fabrication process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4593, Issue , 2001, Pages 176-185

  Ruan, Aiwu ^a   Tse, Man Siu ^a   Chong, Gang Yih ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Dimension; Micromachined gyroscope; Mode shapes; Resonant frequency; Suspension

Indexed keywords

ASPECT RATIO; COMPUTER SIMULATION; ELECTROSTATICS; FABRICATION; FINITE ELEMENT METHOD; MICROMACHINING; MICROSTRUCTURE; NATURAL FREQUENCIES; POLYSILICON; VIBRATIONS (MECHANICAL);

MICROMACHINED GYROSCOPES;

GYROSCOPES;

EID: 0035770639     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448849     Document Type: Conference Paper

References (7)

1. J. Bernstein, S. Cho, A.T. King, A. Kourepenis, P. Maciel and M. Weinberg, "A Micromachined Comb-Drive Tuning Fork Rate Gyroscope", Digest IEEE/ASME Micro Electro Mechanical Systems (MEMS) Workshop, Ft.Lauderdale, Feb. 1993, pp 143-148.
2. W.A. Clark, R.T. Howe and R. Horowitz, "Surface Micromachined Z-Axis Vibratory Rate Gyroscope", Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, June 1996, pp 283-287.
3. T. Juneau and A.P. Pisano, "Micromachined Dual Input Axis Angular Rate Sensor," Solid-State Sensor and Actuator Workshop, Hilton Head, South Carolina, June 1996, pp 299-302.
4. W. Geiger, B. Folkmer, J. Merz, H. Snadmaier and W. Lang, "A New Silicon Rate Gyroscope", Proceedings IEEE Micro Electro Mechanical Systems, Heidelberg, Germany, Jan. 1998, pp 615-620.
5. IntelliSuite™ User Manual Introductory Tour Version 4.0.
6. C.K. Fedder, "Simulation of Microelectromechanical Systems", Ph.D. thesis, 1994, University of California at Berkeley.
7. Y.H. Cho, "Design, Fabrication, and Optimization of Micromechanical Flexures", Ph.D. thesis, University of California at Berkeley.