MEMS and NEMS based smart devices and systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4591, Issue , 2001, Pages 28-38

  Varadan, V K ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACTUATORS; CARBON NANOTUBES; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; NANOTECHNOLOGY; REINFORCED PLASTICS; SELF ASSEMBLY;

SMART DEVICES;

LOGIC DEVICES;

EID: 0035768528     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.449169     Document Type: Conference Paper

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