Delta: Design and control of a flexure hinges mechanism

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4568, Issue , 2001, Pages 135-142

  Bacher, Jean Philippe ^a   Bottinelli, Stefano ^a   Breguet, Jean Marc ^a   Clavel, Reymond ^a  

^a EPFL   (Switzerland)

Author keywords

Direct drive; Flexure hinges; Micro positioning; Parallel robots; Ultra high precision

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); HINGES; KINEMATICS; PRECISION ENGINEERING; SERVOMOTORS;

FLEXURE HINGES;

FLEXIBLE MANIPULATORS;

EID: 0035767973     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.444120     Document Type: Conference Paper

References (5)

1. C.T. Johnson and R.D. Lorenz, "Experimental Identification of Friction and Its Compensation in Precise, Position Controlled Mechanisms", IEEE Transactions on Industry Applications, Vol. 28, pp. 1392-1398, Nov./Dec. 1992.
2. S.T. Smith and D. Chetwynd, Foundations of Ultraprecision Mechanism design, Vol. 2, Series Editor: D. Keith Bowen, University of Warwick, UK: Gordon and Beach Science Publishers, 1992.
3. J.W. Ryu, D.G. Gweon and K.S. Moon, "Optimal design of a flexure hinge based XYθ wafer stage", Journal of the American Society for Precision Engineering, Vol. 21(1), pp. 18-28, Jul. 1997.
4. S. Henein, C. Aymon, S. Bottinelli and R. Clavel, "Articulated structures with flexible joints dedicated to high precision robotics", Proc. of International Advanced Robotics Programme: Workshop on Micro Robots, Micro Machines and Systems, Moscow, Russia, pp. 135-140, 1999.
5. R. Clavel, "Conception d'un robot parallèle rapide à 4 degrés de liberté", Ph. D. diss., EPFL, Lausanne, 1991.