Laser microchemical etching of waveguides and quasi-optical components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4557, Issue , 2001, Pages 101-110

  Drouët d'Aubigny, Christian Y ^a   Walker, Christopher K ^a   Jones, Bryan D ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

AR; Beam combiner; FIR; Heterodyne mixer array; Laser; Micro machining; Spatial filtering; THz; Wave guide

Indexed keywords

HETERODYNING; LASER APPLICATIONS; MICROMACHINING; OPTICAL WAVEGUIDES; SILICON;

LASER MICROCHEMICAL ETCHING; SPATIAL FILTERING;

ETCHING;

EID: 0035767706     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.442932     Document Type: Conference Paper

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