Experimental analysis of high-resolution soft X-ray microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4499, Issue , 2001, Pages 134-141

  Chao, Weilun ^a   Anderson, Erik H ^a   Denbeaux, Gregory ^a   Harteneck, Bruce ^a   Pearson, Angelic L ^a   Olynick, Deirdre ^a   Schneider, Gerd ^a   Attwood, David ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Gold island pattern; High aspect ratio; Resolution; Soft x ray microscope; XM 1; Zone plate

Indexed keywords

ASPECT RATIO; CHARGE COUPLED DEVICES; GOLD PLATING; MIRRORS; NICKEL PLATING; OPTICAL FIBER FABRICATION; OPTICAL MULTILAYERS; PHOTONS; PHOTORESISTS; SCANNING ELECTRON MICROSCOPY; X RAY ANALYSIS;

BILAYER RESIST PROCESS; GOLD ISLAND PATTERN; MICRO ZONE PLATE; MULTILAYER MIRROR; SOFT X RAY MICROSCOPY; ZONE PLATE FABRICATION;

X RAY MICROSCOPES;

EID: 0035767656     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.450231     Document Type: Conference Paper

References (9)

1. W. Meyer-Ilse, H. Medecki, L. Jochum, E. Anderson, D. Attwood, C. Magowan, R. Balhorn, M. Moronne, D. Rudolph, G. Schmahl, "New High-resolution Zone-plate Microscope at Beamline 6.1 of the ALS," Synchrotron Radiation News, 8, pp. 22-23 (1995).
2. G. Denbeaux, E. Anderson, W. Chao, T. Eimüller, L. Johnson, M. Köhler, C. Larabell, M. Legros, P. Fischer, A. Pearson, G. Schütz, D. Yager and D. Attwood, "Soft X-ray microscopy to 25 nm with applications to biology and magnetic materials," Nuclear Instruments and Methods in Physics Research Section Accelerators, Spectrometers, Detectors and Associated Equipment, Volumes 467-468, Part 2, pp. 841-844 (2001)
3. E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, and D. Attwood, Jr., "Nanofabrication and Diffractive Optics For High-Resolution X-Ray Applications," J. Vac. Sci. Techn. B 18(6), 2970-2975 (2000)
4. W. Chao, E. H. Anderson, G. Denbeaux, B. Harteneck, M. Le Gros, A. L. Pearson, D. Olynick, D. Attwood, "High Resolution Soft X-ray Microscopy," Soft X-Ray and EUV Imaging Systems, Edited by W. M. Kaiser and R. H. Stulen, SPIE 4146, pp. 171-175 (2000)
5. G. Denbeaux, L.E. Johnson, and W. Meyer-Ilses, "Spectroscopy at the XM-1," X-Ray Microscopy, Edited by W. Meyer-Ilse, T. Warwick and D. Attwood, AIP, New York, 1999, pp. 478-483.
6. G. Denbeaux, P. Fischer, G. Kusinski, M. Le Gros, A. Pearson and D. Attwood, "A Full Field Transmission X-ray Microscope as a tool for High-Resolution Magnetic Imaging," IEEE Trans. on Magnetics, 37(4), pp. 2764-2766 (2001)
7. B. L. Henke, E. M. Gullikson and J. C. Davis, "X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92," Atomic Data and Nucl. Data Tables, 54, 181 pp. 191-342 (1993) Current updates are maintained by E. M. Gullikson at http://www-cxro.lbl.gov/optical_constants/
8. G. Schneider, D. Hambach, B. Niemann, B. Kaulich, J. Susini, N. Hoffmann, and W. Hasse, "In situ x-ray microscopic observation of the electromigration in passivated Cu interconnects," Appl. Phys. Lett., 74, pp. 1936-1938 (2001)
9. G. Schneider, G. Denbeaux, F. Salmassi, and P. Nachimuthu, to be published.