Sensing and actuating functionality of hybrid MEMS combining enhanced chemi-mechanical transduction with surface enhanced Raman spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4560, Issue , 2001, Pages 152-161

  Lavrik, Nickolay V ^a   Tipple, Chris A ^a   Datskos, Panos G ^a   Sepaniak, Michael J ^a  

^a UNIVERSITY OF TENNESSEE   (United States)

Author keywords

Actuator; Gold nanostructures; Hybrid sensors; Hydrogel; MEMS; Microfluidics; Mirocantilever; SERS

Indexed keywords

FLUIDICS; HYBRID SENSORS; HYDROGELS; INTERFACES (MATERIALS); MOLECULES; PHOTORESISTS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; TRANSDUCERS;

MICROCANTILEVERS (MC);

MICROELECTROMECHANICAL DEVICES;

EID: 0035765889     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.443054     Document Type: Conference Paper

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