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Volumn 4468, Issue , 2001, Pages
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Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing
[No Author Info available]
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS ALLOYS;
HETEROJUNCTIONS;
IMAGING SYSTEMS;
INTERFEROMETRY;
ION BEAMS;
ION IMPLANTATION;
IRON COMPOUNDS;
MULTILAYERS;
NITROGEN;
OPTICAL GLASS;
OPTICAL WAVEGUIDES;
PHOTOLUMINESCENCE;
SAPPHIRE;
SECONDARY ION MASS SPECTROMETRY;
SILICON ALLOYS;
SURFACE ROUGHNESS;
BEAM FOCUSING;
CHALCOGENIDE WAVEGUIDES;
EIREV;
GAS-CLUSTER ION BEAMS (GCIB);
ION BEAM IRRADIATION;
ION BEAM MIXING;
METAL-OXIDE FILMS;
OPTICAL DIAGNOSTICS;
PHOTONIC INTEGRATED DEVICES;
THERMALLY ANNEALED ALLOYS;
THIN FILMS;
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EID: 0035765513
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Review |
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Times cited : (1)
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References (0)
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