Self-referencing, motion-insensitive approach for absolute aspheric profiling of large optics to the nanometer level and beyond

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 313-324

  Glenn, Paul ^a,b   Hull Allen, Greg ^a,b  

^a Bauer Associates Inc   (United States)

^b NONE   (United States)

Author keywords

Aspheric; Full aperture; Metrology; Noncontact; Profilometer; Self referencing

Indexed keywords

NANOSTRUCTURED MATERIALS; OPTICAL VARIABLES MEASUREMENT; PROBES; PROFILOMETRY; SURFACE PROPERTIES;

CONVEX OPTICS; PROTOTYPE INSTRUMENT;

OPTICAL TESTING;

EID: 0035765437     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.453630     Document Type: Article

References (4)

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3. D.S. Anderson and J.H. Burge, "Swing-arm profilometry of aspherics," Optical Manufacturing and Testing, V. J. Doherty and H. P. Stahl, editors, SPIE Proceedings 2536, p. 169-179, 1995.
4. Y. Aoki and S. Ozono, On a new method of roundness measurement based on the three-point method, J. of JSPE 32-12, 1966.