Modeling of RF MEMS switches

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4559, Issue , 2001, Pages 112-119

  Robertson, Barbara ^a   Ho, Fat Duen ^b   Hudson, Tracy ^a  

^a US Army Aviation and Missile Command   (United States)

^b UNIVERSITY OF ALABAMA IN HUNTSVILLE   (United States)

Author keywords

MEMS; Micro; Model; RF; Switch

Indexed keywords

CANTILEVER BEAMS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTRIC FILTERS; ELECTRIC SWITCHES; ELECTROMAGNETISM; ELECTROSTATICS; INSERTION LOSSES; MATHEMATICAL MODELS; PHASE SHIFTERS; PIEZOELECTRICITY;

LUMPED ELEMENT MODELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035763648     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443025     Document Type: Article

References (18)

1. www.memsrus.com/cronos/prodrelay.htm.
2. G. Tangonan, R. Loo, J. Schaffner, and J.J. Lee, "Microwave Photonic Applications of MEMS Technology", Microwave Photonics, 1999. MWP '99. International Topical Meeting on, Vol.1, pp. 109-112.
3. Jamie Z. Yao, Shea Chen, Susan Eshelman, David Denniston, and Chuck Goldsmith, "Micromachined Low-Loss Microwave Switches", IEEE Journal of Microelectromechanical Systems, Vol. 8, No. 2, pp. 129-134, June 1999.
4. B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, and C. Goldsmith, "Ka-band RF MEMS phase shifters for phased array applications", Radio Frequency Integrated Circuits (RFIC) Symposium, 2000, Digest of Papers, pp. 195 -199.
5. J.J. Yao, and M.F. Chang, "A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz", Solid-State Sensors and Actuators, 1995 and Eurosensors IX. Transducers '95. The 8th International Conference on, Volume: 2, pp. 384-387.
6. J.Y. Park, G.H. Kim, K.W. Chung, and J.U. Bu, "Electroplated rf MEMS capacitive switches", Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on, pp. 639-644.
7. J.B. Muldavin, and G.M. Rebeiz, "High-isolation inductively-tuned X-band MEMS shunt switches", Microwave Symposium Digest. 2000 IEEE MTT-S International, Volume: 1,2000, pp. 169 - 172.
8. N. Scott Barker, and Gabriel Rebeiz, "Distributed MEMS True-Time Delay Phase Shifters and Wide-Band Switches", IEEE Transactions on Microwave Theory and Techniques, Vol 46, No. 11, Nov 98, pp. 1881-1890.
9. Paul M. Zavracky, Nicol E. McGruer, Richard H. Morrison, and David Potter, "Microswitches and Microrelays with a View Toward Microwave Applications", Int J RF and Microwave CAE 9, John Wiley & Sons, Inc., pp. 338-347, 1999.
10. Shyh-Chiang Shen, and M. Feng, "Low actuation voltage RF MEMS switches with signal frequencies from 0.25 GHz to 40 GHz", Electron Devices Meeting, 1999. IEDM Technical Digest. International, 1999, pp. 689-692.
11. Charles L. Goldsmith, Andrew Malczewski, Zhimin J. Yao, Shea Chen, John Ehmke, and David H. Hinzel, "RF MEMs variable capacitors for tunable filters", International Journal of RF and Microwave Computer-Aided Engineering, Volume: 9, Issue: 4, Date: July 1999, pp. 362-374.
12. Sonya Read, Tracy Hudson, and Barbara Robertson, "RF MEMS Research and Development for Army Missile Applications", Paper No. 22, Proceedings from Workshop on Affordability and Cost Reduction for Radar Systems, Redstone Arsenal, AL, 5-6 April 2000.
13. Hector J. De Los Santos, Introduction to Microelectromechanical (MEM) Microwave Systems, Artech House, 1999.
14. Bartlomiej F. Romanowicz, Methodology for the Modeling and Simulation of Microsystems, Kluwer Academic Publishers, 1998.
15. H. Nishiyama, and M. Nakamura, "Capacitance of a strip capacitor", Components, Hybrids, and Manufacturing Technology, IEEE Transactions on [see also IEEE Trans. on Components, Packaging, and Manufacturing Technology, Part A, B, C], Volume: 13, Issue: 2, June 1990, pp. 417 -423.
16. J.J.-Y. Gill, L.V. Ngo, P.R Nelson, and Chang-Jin Kim, "Elimination of extra spring effect at the step-up anchor of surface-micromachined structure", Microelectromechanical Systems, Journal of, Volume: 7 Issue: 1, March 1998, pp. 114-121.
17. E.K. Chan, K. Garikipati, and R.W. Dutton, "Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling", Microwave Photonics, 1999. MWP '99. International Topical Meeting on.
18. H.A.C. Tilmans, R. Legtenberg, H. Schurer, D.J. Ijntema, M. Elwenspoek, and J.H.J. Fluitman, "(Electro-) Mechanical Characteristics of Electrostatically Driven Vacuum Encapsulated Polysilicon Resonators", IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol 41, No. 1, Jan 94, pp. 4-6.