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Volumn 4510, Issue , 2001, Pages 225-232

Theoretical analysis of achromatic deflectors

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ELECTRODES; ELECTROSTATICS; MAGNETIC FIELD EFFECTS; PARTICLE BEAMS; SCANNING ELECTRON MICROSCOPY;

EID: 0035762788     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.451280     Document Type: Article
Times cited : (3)

References (7)
  • 1
    • 4143074467 scopus 로고
    • Recent advances in electron beam addressed memories
    • p. VII "Electron-Optical Systems"
    • Kelly J., "Recent Advances in Electron Beam Addressed Memories", p. VII "Electron-Optical Systems", Adv.in Electr.@Electron Phys., 43. pp.116-130. 1977.
    • (1977) Adv. in Electr.@Electron Phys. , vol.43 , pp. 116-130
    • Kelly, J.1
  • 2
    • 0000219639 scopus 로고    scopus 로고
    • Sextupole deflectore
    • Sov. Phys. Tech. Phys. 45(8), 2000
    • Ovsyannikova L.P., Fishkova T.Ya., "Sextupole Deflectore", Zh. Tekh. Fiz., 70, pp. 104-107, 2000, [Sov. Phys. Tech. Phys. 45(8), 2000].
    • (2000) Zh. Tekh. Fiz. , vol.70 , pp. 104-107
    • Ovsyannikova, L.P.1    Fishkova, T.Y.2
  • 3
    • 0001259837 scopus 로고
    • Electrostatic deflectors with plane electrodes
    • Sov. Phys. Tech. Phys. 31, pp. 791-794, 1986
    • Ovsyannikova L.P., Fishkova T.Ya. "Electrostatic Deflectors with Plane Electrodes" Zh. Tekh.Fiz., 56, pp. 1348-1353, 1986 [Sov. Phys. Tech. Phys. 31, pp. 791-794, 1986].
    • (1986) Zh. Tekh. Fiz. , vol.56 , pp. 1348-1353
    • Ovsyannikova, L.P.1    Fishkova, T.Y.2
  • 4
    • 0001394413 scopus 로고
    • Plane deflector
    • Sov. Phys. Tech. Phys., 33(6), pp. 692-696, 1988
    • Ovsyannikova L.P., Fishkova T.Ya. "Plane Deflector "Zh. Tekh. Fiz., 58, pp.1176-1180, 1988 [Sov…Phys. Tech. Phys., 33(6), pp. 692-696, 1988].
    • (1988) Zh. Tekh. Fiz. , vol.58 , pp. 1176-1180
    • Ovsyannikova, L.P.1    Fishkova, T.Y.2
  • 5
    • 0020828804 scopus 로고
    • In-lens deflection system with nonequisectored-type multipole electrostatic deflectors
    • Gota E., Soma T., Idesawa M. et al., "In-lens deflection system with nonequisectored-type multipole electrostatic deflectors" J. Vac. Sci. Techn. B, 1, pp. 1289-1292, 1983.
    • (1983) J. Vac. Sci. Techn. B , vol.1 , pp. 1289-1292
    • Gota, E.1    Soma, T.2    Idesawa, M.3
  • 6
    • 0020829426 scopus 로고
    • Numerical considerations on multipole-type electrostatic deflectors
    • Idesawa M., Soma T., Gota E., Sasaki T., "Numerical considerations on multipole-type electrostatic deflectors" J. Vac. Sci. Techn. B, 1, pp. 1322-1326, 1983.
    • (1983) J. Vac. Sci. Techn.B , vol.1 , pp. 1322-1326
    • Idesawa, M.1    Soma, T.2    Gota, E.3    Sasaki, T.4
  • 7
    • 0021155727 scopus 로고
    • A computer-aided evalution system for sectored-type multipole electrostatic deflectors
    • Soma T., Idesawa M., Gota E., Sasaki T., "A computer - aided evalution system for sectored - type multipole electrostatic deflectors" J. Vac. Sci. Techn. B, 3, pp. 177-180, 1985.
    • (1985) J. Vac. Sci. Techn. B , vol.3 , pp. 177-180
    • Soma, T.1    Idesawa, M.2    Gota, E.3    Sasaki, T.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.