Precision optical asphere fabrication by Plasma Jet Chemical Etching (PJCE) and ion beam figuring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 242-248

  Schindler, Axel ^a   Boehm, Georg ^a   Haensel, Thomas ^a   Frank, Wilfried ^a   Nickel, Andreas ^a   Rauschenbach, Bernd ^a   Bigl, Frieder ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Aspheres; Etching; Figuring; Plasma

Indexed keywords

ETCHING; ION BEAMS; MACHINING; OPTICAL MATERIALS; PLASMA JETS; SURFACE ROUGHNESS;

ION BEAM FIGURING; PLASMA JET CHEMICAL ETCHING; PRECISION OPTICAL ASPHERE FABRICATION;

ASPHERICS;

EID: 0035761303     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453622     Document Type: Conference Paper

References (8)

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