Fabrication of gray-scale masks and diffractive optical elements with LDW-glass

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4440, Issue , 2001, Pages 73-84

  Korolkov, Victor ^a   Malyshev, Anatoly ^a   Poleshchuk, Alexander ^a   Cherkashin, Vadim ^a   Tiziani, Hans J ^b   Pruß, Christof ^b   Schoder, Thomas ^b   Westhauser, Johann ^b   Wu, C ^c  

^a INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

^b UNIVERSITY OF STUTTGART   (Germany)

^c Canyon Materials Inc   (United States)

Author keywords

Diffractive optics; Direct laser writing; Gray scale mask; LDW glass

Indexed keywords

COST EFFECTIVENESS; FABRICATION; HEAT RESISTANCE; LIGHT TRANSMISSION; MASKS; OPTICAL DEVICES; OPTICAL GLASS;

GRAY-SCALE MASKS (GSM);

DIFFRACTIVE OPTICS;

EID: 0035759652     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448026     Document Type: Article

References (12)

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