Wavelength stabilization in an excimer laser source using piezoelectric active vibration control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4346, Issue 2, 2001, Pages 1190-1201

  Spangler, Ronald ^a   Jacquess, Robert ^a   Brown, Daniel ^b   Algots, J Martin ^b   Partlo, William ^b  

^a ACX A Division of Cymer   (United States)

^b CYMER INC   (United States)

Author keywords

Control; Excimer; Laser; Lithography; Piezoelectric; Servo; Vibration

Indexed keywords

BANDWIDTH; EXCIMER LASERS; PIEZOELECTRICITY; STABILITY; VIBRATION CONTROL;

ACTIVE VIBRATION CONTROL (AVC);

PHOTOLITHOGRAPHY;

EID: 0035758826     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.435653     Document Type: Article

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