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Volumn 4346, Issue 2, 2001, Pages 1635-1643
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Aerial image sensor for self-calibration of wafer steppers
a a a a a a |
Author keywords
Aerial image; Best focus calibration; Scanner; Scanning slit; Stepper
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Indexed keywords
ABERRATIONS;
FOCUSING;
LENSES;
OPTICAL RESOLVING POWER;
SCANNING;
AERIAL IMAGE SENSORS;
WAFER STEPPERS;
IMAGE SENSORS;
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EID: 0035758729
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.435705 Document Type: Conference Paper |
Times cited : (16)
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References (1)
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