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Volumn 4346, Issue 2, 2001, Pages 1635-1643

Aerial image sensor for self-calibration of wafer steppers

Author keywords

Aerial image; Best focus calibration; Scanner; Scanning slit; Stepper

Indexed keywords

ABERRATIONS; FOCUSING; LENSES; OPTICAL RESOLVING POWER; SCANNING;

EID: 0035758729     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.435705     Document Type: Conference Paper
Times cited : (16)

References (1)
  • 1
    • 0029215440 scopus 로고
    • Automatic laser scanning focus detection method using printed focus pattern
    • Optical/Laser Microlithography
    • K. Suwa, H. Tateno, N. Irie, S. Hirukawa "Automatic laser scanning focus detection method using printed focus pattern," Optical/Laser Microlithography, SPIE Vol. 2440, p.712,1995.
    • (1995) SPIE , vol.2440 , pp. 712
    • Suwa, K.1    Tateno, H.2    Irie, N.3    Hirukawa, S.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.