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Volumn 4375, Issue , 2001, Pages 275-282
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Solid particle erosion performance of a new ultradurable AR for silicon
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Author keywords
Boron phosphide; Coating; Durable; Erosion; Silicon; Stealth
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Indexed keywords
BORON COMPOUNDS;
CHEMICAL VAPOR DEPOSITION;
ENVIRONMENTAL IMPACT;
EROSION;
MULTILAYERS;
PLASMA APPLICATIONS;
SUBSTRATES;
LOW ENERGY MULTILAYERS;
PROTECTIVE COATINGS;
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EID: 0035758537
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.439185 Document Type: Conference Paper |
Times cited : (2)
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References (6)
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