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Volumn 14, Issue 3, 2001, Pages 341-344

Photobleaching photoacid generator

Author keywords

ArF excimer laser lithography; Cyclopropyldiphenyl sulfonium trifluoromethane sulfonate; Photoacid generator; Photobleaching

Indexed keywords

ACID; CYCLOPROPANE DERIVATIVE; SULFONIUM DERIVATIVE; TRIFLUOROMETHANESULFONIC ACID;

EID: 0035747315     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.14.341     Document Type: Article
Times cited : (1)

References (12)
  • 7
    • 85036997768 scopus 로고    scopus 로고
    • U.S Patent: 4,233,292


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.