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Volumn 14, Issue 3, 2001, Pages 341-344
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Photobleaching photoacid generator
a a b b |
Author keywords
ArF excimer laser lithography; Cyclopropyldiphenyl sulfonium trifluoromethane sulfonate; Photoacid generator; Photobleaching
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Indexed keywords
ACID;
CYCLOPROPANE DERIVATIVE;
SULFONIUM DERIVATIVE;
TRIFLUOROMETHANESULFONIC ACID;
ARTICLE;
BLEACHING;
GENERATOR;
LIGHT EXPOSURE;
SYNTHESIS;
THERMOSTABILITY;
ULTRAVIOLET SPECTROSCOPY;
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EID: 0035747315
PISSN: 09149244
EISSN: None
Source Type: Journal
DOI: 10.2494/photopolymer.14.341 Document Type: Article |
Times cited : (1)
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References (12)
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