Technology of silicon nano- and microelectrode arrays for pollution control

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2001, Pages 39-42

  Kleps, Irina ^a   Angelescu, Anca ^a   Miu, Mihaela ^a   Avram, Marioara ^a   Simion, Monica ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; COMPUTER ARCHITECTURE; CYCLIC VOLTAMMETRY; DEPOSITION; ETCHING; SENSORS;

DIELECTRIC FILM DEPOSITION; FARADAY CURRENT; MICROELECTRODE ARRAYS; NANOELECTRODES;

MICROELECTRODES;

EID: 0035744153     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. CV-simulation and analysis of reaction mechanisms