Simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2001, Pages 201-204

  Pavelescu, Ioan ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; INTERFEROMETRY; OPTICAL WAVEGUIDES; PHOTOELASTICITY; REFRACTIVE INDEX; SEMICONDUCTING SILICON;

MACH-ZEHNDER INTERFEROMETRY; OPTOMECHANICAL EFFECTS; PHOTOELASTIC TRANSDUCTION; PHOTONIC TRANSPORT; PIEZORESISTIVITY;

SENSORS;

EID: 0035744110     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)