Silica-on-silicon optical waveguides

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 22, Issue 12, 2001, Pages 1546-1550

  Xu, Yong Qing ^a   Liang, Chun Guang ^a   Yang, Yong Jun ^a   Zhao, Tong ^a  

^a Min of Info Indust   (China)

Author keywords

FHD; MEMS; Optical waveguides; Silica

Indexed keywords

GERMANIUM; REACTIVE ION ETCHING; SEMICONDUCTOR DOPING; WAVEGUIDE JUNCTIONS;

MICROELECTROMECHANICAL SYSTEM; OPTICAL WAVEGUIDE; SILICON ON SILICON;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0035741498     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Si base integrated optics technology
2. Silica-based optical integrated circuits
3. Silicon micromachining for micro-replication technologies
4. Integrated optics: An introduction
5. 2 doped silica ridge waveguides
6. Vertically integrated high-silica channel waveguides on Si
7. Waveguides on silicon and their application to integrated-optic components