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Volumn 6, Issue , 2001, Pages 32-33

Low loss InP-based photonic crystal waveguides etched with Ar/Cl2 chemically assisted ion beam etching

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; COMPUTER SIMULATION; CRYSTALS; DRY ETCHING; FINITE DIFFERENCE METHOD; HETEROJUNCTIONS; ION BEAMS; OPTICAL FIBER FABRICATION; PHOTONS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM PHOSPHIDE; TIME DOMAIN ANALYSIS;

EID: 0035741396     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (4)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.