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Volumn 6, Issue , 2001, Pages 32-33
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Low loss InP-based photonic crystal waveguides etched with Ar/Cl2 chemically assisted ion beam etching
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CHARACTERIZATION;
COMPUTER SIMULATION;
CRYSTALS;
DRY ETCHING;
FINITE DIFFERENCE METHOD;
HETEROJUNCTIONS;
ION BEAMS;
OPTICAL FIBER FABRICATION;
PHOTONS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING INDIUM PHOSPHIDE;
TIME DOMAIN ANALYSIS;
PHOTONIC CRYSTAL (PC) WAVEGUIDES;
OPTICAL WAVEGUIDES;
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EID: 0035741396
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (5)
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