Scanning laser interferometric evaluation of individual elements and an entire micro-electro-mechanical ultrasonic array transducer

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2001, Pages 883-886

  Blackshire, James L ^a   Sathish, Shamachary ^a  

^a UNIVERSITY OF DAYTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; DIFFRACTION; ELECTRIC POTENTIAL; INTERFEROMETERS; INTERFEROMETRY; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES;

MICROELECTROMECHANICAL ULTRASONIC TRANSDUCER; SCANNING LASER INTERFEROMETER;

ULTRASONIC TRANSDUCERS;

EID: 0035728781     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Surface micromachined capacitive ultrasonic transducers
2. Micromachined ultrasonic air-transducers (MUTs)
3. Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers
4. Dynamic visualization of subangstrom high-frequency surface vibrations