Spatially-resolved EELS analysis of multilayer using EFTEM and STEM

Journal of Electron Microscopy

Volumn 50, Issue 6, 2001, Pages 523-528

  Kimoto, Koji ^a   Isakozawa, Shigeto ^b   Aoyama, Takashi ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Energy filtering TEM; Multilayer; Scanning transmission electron microscopy; Spatially resolved EELS; Spectrum imaging

Indexed keywords

CONFERENCE PAPER;

ANGUILLIFORMES;

CHEMICAL SHIFT; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IMAGE RESOLUTION; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES; SILICA;

DEPTH-PROFILE; ELECTRON ENERGY-LOSS SPECTROSCOPIES; ENERGY-FILTERING TEM; ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPIES; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SIO X; SPATIAL RESOLUTION; SPATIALLY RESOLVED; SPATIALLY-RESOLVED ELECTRON ENERGY-LOSS SPECTROSCOPY; SPECTRUM IMAGING;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 0035723665     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/50.6.523     Document Type: Conference Paper

References (13)

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11. Analyses of composition and chemical shift of Si oxynitride film using EFTEM-based spatially resolved EELS
12. Spatial resolution in EFTEM elemental maps