Monolithic silicon optoelectronic biochips

Technical Digest-International Electron Devices Meeting

Volumn , Issue , 2001, Pages 359-362

  Misiakos, Konstantinos ^a   Kakabakos, Sotiris E ^b   Douvas, Antonios ^a   Argitis, Panayiotis ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBILITY; DENSITY (OPTICAL); MONOLITHIC INTEGRATED CIRCUITS; OPTOELECTRONIC DEVICES; PHOTORESISTS; PROBES; PROTEINS; SEMICONDUCTING SILICON; TRANSDUCERS;

BIOCOMPATIBLE PHOTORESIST; HIGH PROBE DENSITY; OPTOELECTRONIC BIOCHIPS; OPTOELECTRONIC TRANSDUCER; PROTEIN DETECTION;

ELECTRONIC MEDICAL EQUIPMENT;

EID: 0035717518     PISSN: 01631918     EISSN: None     Source Type: Journal    
DOI: 10.1109/IEDM.2001.979511     Document Type: Article

References (4)

1. Monolithic integration of light emitting diodes, detectors and optical fibers on a silicon wafer: A CMOS compatible optical sensor
2. Temperature dependence of the surface plasmon resonance of Au/Sio2 nanocomposite films
3. Light-directed, spatially addressable parallel chemical synthesis
4. Photolithographic patterning of proteins with photoresists processable under biocompatible conditions