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Volumn , Issue , 2001, Pages 371-374

A micromachined integratable thermal reactor

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC REACTORS; EQUIVALENT CIRCUITS; FINITE ELEMENT METHOD; HEAT CONVECTION; HEAT RESISTANCE; HEAT TRANSFER; MICROMACHINING; SILICON; SUBSTRATES; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY; THERMAL CYCLING;

EID: 0035717187     PISSN: 01631918     EISSN: None     Source Type: Journal    
DOI: 10.1109/IEDM.2001.979514     Document Type: Article
Times cited : (4)

References (4)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.