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Volumn , Issue , 2001, Pages 371-374
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A micromachined integratable thermal reactor
a a a a b b b c b |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC REACTORS;
EQUIVALENT CIRCUITS;
FINITE ELEMENT METHOD;
HEAT CONVECTION;
HEAT RESISTANCE;
HEAT TRANSFER;
MICROMACHINING;
SILICON;
SUBSTRATES;
TEMPERATURE DISTRIBUTION;
THERMAL CONDUCTIVITY;
THERMAL CYCLING;
MINIATURISED TOTAL ANALYSIS SYSTEM;
REACTION CHAMBER;
THERMAL CROSS TALK;
THERMAL REACTOR;
THERMALLY CONDUCTIVE SILICON MEMBRANE;
ELECTRIC HEATING ELEMENTS;
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EID: 0035717187
PISSN: 01631918
EISSN: None
Source Type: Journal
DOI: 10.1109/IEDM.2001.979514 Document Type: Article |
Times cited : (4)
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References (4)
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