HVEM observation of crack tip dislocations in silicon crystals

Materials Science and Engineering: A

Volumn 319-321, Issue , 2001, Pages 683-686

  Higashida, K ^a   Kawamura, T ^a   Morikawa, T ^a   Miura, Y ^a   Narita, N ^b   Onodera, R ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Crack; Dislocation; Fracture; HVEM; Shielding; Silicon

Indexed keywords

ANNEALING; CRACKS; CRYSTAL ORIENTATION; DISLOCATIONS (CRYSTALS); ELECTRON MICROSCOPY; INDENTATION; RESIDUAL STRESSES; SILICON WAFERS;

HIGH VOLTAGE ELECTRON MICROSCOPY (HVEM);

CRYSTALS;

CRACK TIP; CRYSTAL; DISLOCATION; MICROSCOPY; SILICON;

EID: 0035706653     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(01)00957-1     Document Type: Article

References (11)