The testing method of mechanical properties of thin films

Jixie Qiangdu/Journal of Mechanical Strength

Volumn 23, Issue 4, 2001, Pages 413-429

  Chen, Longqing ^a   Zhao, Minghao ^a   Zhang, Tong Yi ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Bulge test; Hardness; Indentation fracture technique; Mechanical characterization; Micro rotating structure; Microbridge test; Microcantilever beam; Nanoindentation; Residual stresses; Strength; Thin film; Young's modulus

Indexed keywords

EID: 0035699776     PISSN: 10019669     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (122)