Some problems of solid mechanics for micro-electro-mechanical systems

Jixie Qiangdu/Journal of Mechanical Strength

Volumn 23, Issue 4, 2001, Pages 380-384

  Yu, Shouwen ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Elastic plastic adhesive contact mechanics; Interface (Interphase) mechanics; Micro electro mechanical system; Thin film substrate structure

Indexed keywords

EID: 0035699775     PISSN: 10019669     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)