Prototyped XY stages driving EB mastering for a high density optical recording

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Volumn 2, Issue , 2001, Pages

  Hosaka, Sumio ^a   Koyanagi, Hajime ^a   Katoh, Keizou ^a   Isshiki, Fumio ^a   Suzuki, Tatsundo ^a   Miyamoto, Mitsuhide ^a   Miyauchi, Yasushi ^a   Arimoto, Akira ^a   Nishida, Testuya ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (OPTICAL); ELECTRON BEAMS; ERROR CORRECTION; LASER OPTICS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR LASERS;

ELECTRON-BEAM WRITING; STATIC ELECTRIC DEFLECTORS;

OPTICAL RECORDING;

EID: 0035688546     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Conf. optical data storage