Detection of defects in SiC crystalline films by Raman scattering

Physica B: Condensed Matter

Volumn 308-310, Issue , 2001, Pages 684-686

  Nakashima, S ^a,b   Nakatake, Y ^a   Ishida, Y ^b   Talkahashi, T ^b   Okumura, H ^b  

^a UNIVERSITY OF MIYAZAKI   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Defects; Raman scattering; SIC; Stacking faults

Indexed keywords

ELECTRON MICROSCOPY; PHONONS; RAMAN SCATTERING; STACKING FAULTS; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINE FILMS; RAMAN BANDS;

SILICON CARBIDE;

EID: 0035672545     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(01)00795-5     Document Type: Article

References (4)