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Volumn 308-310, Issue , 2001, Pages 792-795
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Study of vacancy-type defects after Cu diffusion in GaAs
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Author keywords
Cu diffusion; GaAs; Positron annihilation; TEM; Vacancy clusters
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Indexed keywords
ANNEALING;
COPPER;
CRYSTAL DEFECTS;
DIFFUSION;
POSITRONS;
QUENCHING;
TRANSMISSION ELECTRON MICROSCOPY;
VAPOR PRESSURE;
VACANCY CLUSTERS;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0035669111
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(01)00805-5 Document Type: Article |
Times cited : (6)
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References (6)
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