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Volumn 308-310, Issue , 2001, Pages 761-764
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Passivation of growth defects in GaAs/AlGaAs multiple quantum well structures by CF4 plasma
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Author keywords
Defect passivation; Photoluminescence; Plasma treatment
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Indexed keywords
CRYSTAL DEFECTS;
PASSIVATION;
PHOTOLUMINESCENCE;
PLASMA THEORY;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTING GALLIUM ARSENIDE;
QUANTUM WELL STRUCTURES;
SEMICONDUCTOR QUANTUM WELLS;
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EID: 0035668958
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(01)00831-6 Document Type: Article |
Times cited : (2)
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References (20)
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