The effect of deposition parameters on the chemical composition and corrosion resistance of TiCxNy coatings produced on high-speed steel substrates

Brazilian Journal of Chemical Engineering

Volumn 18, Issue 4, 2001, Pages 399-409

  Senna, L F ^a,b   Achete, C A ^b   Freire Jr , F L ^c   Hirsch, T ^d  

^a STATE UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^b FEDERAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^c National Institute of Science and Technology for Complex Systems   (Brazil)

^d STIFTUNG INSTITUT FÜR WERKSTOFFTECHNIK   (Germany)

Author keywords

Chemical composition; Deposition parameters; Electrochemical behavior; Hard thin films

Indexed keywords

COMPOSITION EFFECTS; CORROSION RESISTANCE; CUTTING TOOLS; HARDNESS; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPUTTER DEPOSITION; STEEL; SUBSTRATES; THIN FILMS; TITANIUM COMPOUNDS; TRIBOLOGY; WEAR RESISTANCE;

GAS MIXTURES;

INORGANIC COATINGS;

EID: 0035663518     PISSN: 01046632     EISSN: None     Source Type: Journal    
DOI: 10.1590/S0104-66322001000400005     Document Type: Article

References (35)

1. The deposition rate of metallic thin films in the reactive sputtering process
2. Ion plated titanium carbonitride films
3. Reactive sputtering using two reactive gases: Experiments and computer modeling
4. Deposition of TiN films with titanium interlayer on low carbon steel by reactive RF magnetron sputtering
5. 1-x coatings by using the arc evaporation technique
6. Properties of TiCN coatings prepared by magnetron sputtering
7. Residual stress and microhardness of DLC multilayer coatings
8. Infrared studies of surface and gas phase reactions leading to the growth of titanium nitride thin films from tetralkis (dimethylamide) titanium and ammonia
9. Chemical vapor deposited TiCN: A new barrier metallization for submicron via and contact applications
10. Characterization of TiCN coatings deposited by magnetron sputtering ion plating process: RBS and GDOS complementary analyses
11. Study of the relative wear and abrasion resistance of Ti(C,N) and TiN coatings
12. Interface analysis of plasma-deposited titanium nitride on stainless steel
13. Initial stages of TiC growing on stainless steel
14. Residual stresses and residual stress distributions in TiCN- and TiN-coated steels
15. Corrosion studies with hard coating-substrate system
16. Tribological characteristics of titanium nitride thin coatings
17. Electrochemical impedance spectroscopy (EIS) as a new tool for investigating methods of corrosion protection
18. Electrochemical study of titanium nitride films obtained by reactive sputtering
19. 1-x coatings
20. 1-x films
21. Effect of deposition parameters on sputtering TiN thin films
22. Analysis of nitrogen-influenced surface near zones of ferrous materials by glow discharge optical spectroscopy (GDOS)
23. Analysis of TiN by charged particles beams: Nuclear reaction analysis
24. Microstructural and morphological effects on the tribological properties of electron enhanced magnetron sputtering hard coatings
25. A study of the corrosion behavior of PVD and CVD TiN films
26. y films by using atomic force microscopy (AFM)
27. Corrosion resistance comparative study of TiN thin films grown under different conditions using EIS and AFM techniques as complementary tools
28. Multilayer, multicomponent and multiphase physical vapor deposition coatings for enhanced performance
29. Properties of dc magnetron reactively sputtered TiN