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Volumn 13, Issue 5, 2001, Pages 259-269
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The preparation of ideally ordered flat H-Si(111) surfaces
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Author keywords
AFM; Anisotropic etching; Silicon; Surface structure
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Indexed keywords
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EID: 0035649018
PISSN: 09144935
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (66)
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References (18)
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