Influence of laser fluence and irradiation timing of F2 laser on ablation properties of fused silica in F2-KrF excimer laser multi-wavelength excitation process

Applied Physics A: Materials Science and Processing

Volumn 73, Issue 6, 2001, Pages 755-759

  Obata, K ^a,b   Sugioka, K ^a   Akane, T ^a   Aoki, N ^a,b   Toyoda, K ^b   Midorikawa, K ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; LASER ABLATION; LASER PULSES; LIGHT ABSORPTION; LIGHT TRANSMISSION;

COLLINEAR IRRADIATION SYSTEM; IRRADIATION TIMING; LASER FLUENCE; MULTIWAVELENGTH EXCITATION PROCESS;

FUSED SILICA;

EID: 0035575835     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390101000     Document Type: Article

References (8)