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Volumn 4, Issue 6, 2001, Pages 467-474
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MOCVD technology in research, development and mass production
a
a
AIXTRON AG
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
LIGHT EMITTING DIODES;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTOR GROWTH;
SEMICONDUCTOR LASERS;
SILICON CARBIDE;
SILICON WAFERS;
SPECTROSCOPIC ANALYSIS;
SUBSTRATES;
REFLECTANCE ANISOTROPY SPECTROSCOPY (RAS);
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
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EID: 0035575411
PISSN: 13698001
EISSN: None
Source Type: Journal
DOI: 10.1016/S1369-8001(02)00004-5 Document Type: Conference Paper |
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Times cited : (13)
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References (6)
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