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Volumn , Issue , 2001, Pages 26-33
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Accurate and efficient design of experiment for reliability assessment. Application to a 20Å gate oxide
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Author keywords
Accuracy; Confidence bounds; Design of experiment; Extrapolation; Optimization; Projection; Reliability assessment; Stress condition
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Indexed keywords
COMPUTER SIMULATION;
EIGENVALUES AND EIGENFUNCTIONS;
ELECTRIC BREAKDOWN OF SOLIDS;
ERROR ANALYSIS;
EXTRAPOLATION;
FAILURE ANALYSIS;
GATES (TRANSISTOR);
MATRIX ALGEBRA;
MONTE CARLO METHODS;
OPTIMIZATION;
PROBABILITY;
RELIABILITY;
STRESSES;
THERMAL EFFECTS;
THICKNESS CONTROL;
STRESS VOLTAGES;
INTEGRATED CIRCUIT MANUFACTURE;
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EID: 0035566330
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (10)
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