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Volumn , Issue , 2001, Pages 26-33

Accurate and efficient design of experiment for reliability assessment. Application to a 20Å gate oxide

Author keywords

Accuracy; Confidence bounds; Design of experiment; Extrapolation; Optimization; Projection; Reliability assessment; Stress condition

Indexed keywords

COMPUTER SIMULATION; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC BREAKDOWN OF SOLIDS; ERROR ANALYSIS; EXTRAPOLATION; FAILURE ANALYSIS; GATES (TRANSISTOR); MATRIX ALGEBRA; MONTE CARLO METHODS; OPTIMIZATION; PROBABILITY; RELIABILITY; STRESSES; THERMAL EFFECTS; THICKNESS CONTROL;

EID: 0035566330     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.