Zinc oxide/copper oxide mixed films deposited by CVD

Materials Research Society Symposium - Proceedings

Volumn 672, Issue , 2001, Pages

  Chang, Yuneng ^a   Yeh, Chihhsiang ^a  

^a LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPPER; COPPER OXIDES; METALLIC FILMS; MICROSTRUCTURE; MORPHOLOGY; OXYGEN; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC; ZINC OXIDE;

COPPER ACETYLACETONATE; DEPOSITION TEMPERATURE; ZINC OXIDE COPPER OXIDE MIXED FILM;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0035559806     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-672-o8.37     Document Type: Conference Paper

References (27)

1. Surface segregation in metal oxides
2. Molecular beam epitaxy
3. Chap. 5, deposition
4. Coordinate bond energies and inner orbital splitting in some tervalent transition metal acetylacetonates
5. A thermodynamic study of the sublimation process of aluminum and copper acetylacetonates