Synthesis of vertically aligned carbon nanofiber films by RF magnetron sputtering

Materials Research Society Symposium - Proceedings

Volumn 675, Issue , 2001, Pages

  Lee, K Y ^a   Fujimoto, K ^a   Ohkura, S ^a   Honda, S ^a   Katayama, M ^a   Hirao, T ^a   Oura, K ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; ELECTRON BEAMS; EVAPORATION; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SUBSTRATES; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NANOFIBER; ELECTRON BEAM EVAPORATION; HOT FILAMENT;

CARBON FIBERS;

EID: 0035558974     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-675-w3.1.1     Document Type: Conference Paper

References (11)