Fixed abrasive technology for STI CMP on a web format tool

Materials Research Society Symposium - Proceedings

Volumn 671, Issue , 2001, Pages

  Simpson, Alexander ^a   Economikos, Laertis ^a   Jamin, Fen Fen ^a   Ticknor, Adam ^a  

^a INFINEON TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; EROSION; OXIDES; PROCESS CONTROL; REMOVAL; STRUCTURE (COMPOSITION);

FIXED ABRASIVE TECHNOLOGY; PLANARIZATION; SHALLOW TRENCH ISOLATION; WEB FORMAT TOOL;

CHEMICAL MECHANICAL POLISHING;

EID: 0035558728     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. 3M slurry free™ CMP: Fixed abrasives for direct HDP