An evaluation on the effects of newly designed abrasives in CMP slurry

Materials Research Society Symposium - Proceedings

Volumn 671, Issue , 2001, Pages

  Kawahashi, Nobuo ^a   Hattori, Masayuki ^a  

^a JSR CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASION; CHEMICAL MECHANICAL POLISHING; COAGULATION; EMULSION POLYMERIZATION; HYDROLYSIS; MORPHOLOGY; PARTICLE SIZE ANALYSIS; SLURRIES;

DISHING; HETEROCOAGULATION;

ABRASIVES;

EID: 0035557934     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)