STM investigation of energetic insertion during direct ion deposition

Materials Research Society Symposium - Proceedings

Volumn 672, Issue , 2001, Pages

  Pomeroy, Joshua M ^a   Couture, Aaron ^a   Jacobsen, Joachim ^a   Cooper, Barbara H ^a   Sethna, J P ^a   Brock, Joel D ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FILM GROWTH; MOLECULAR DYNAMICS; MONTE CARLO METHODS; SCANNING TUNNELING MICROSCOPY; SINGLE CRYSTALS; SUBSTRATES;

ENERGETIC INSERTION; ION DEPOSITION;

THIN FILMS;

EID: 0035557858     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-672-o2.9     Document Type: Conference Paper

References (14)