Application of IEC61131-3 for semiconductor processing equipment

IEEE International Conference on Emerging Technologies and Factory Automation, ETFA

Volumn 2, Issue , 2001, Pages 47-50

  Sato, T ^a   Yoshida, E ^a   Kakebayashi, Y ^a   Asakura, J ^a   Komoda, Norihisa ^b  

^a KOBE STEEL LTD   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER TOOL CONTROL SOFTWARE SYSTEM; REAL TIME MACHINE CONTROL; SEMICONDUCTOR PROCESSING EQUIPMENT;

CONTROL SYSTEM SYNTHESIS; MAN MACHINE SYSTEMS; REAL TIME SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE; STANDARDS; USER INTERFACES;

FACTORY AUTOMATION;

EID: 0035556885     PISSN: 19460740     EISSN: 19460759     Source Type: Journal    
DOI: 10.1109/ETFA.2001.997669     Document Type: Article

References (5)

1. IEC1131-3