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Volumn 2, Issue , 2001, Pages 599-602
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The scanning electron microscope as sensor system for mobile microrobots
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPTH MEASUREMENT;
ELECTRON BEAM TRIANGULATION;
MOBILE MICROROBOTS;
POSITION SENSOR SYSTEM;
SCANNING ELECTRON MICROSCOPE;
CALIBRATION;
CHARGE COUPLED DEVICES;
CLOSED LOOP CONTROL SYSTEMS;
DEGREES OF FREEDOM (MECHANICS);
ELECTRON BEAMS;
GRIPPERS;
IMAGE PROCESSING;
MICROELECTROMECHANICAL DEVICES;
SCANNING ELECTRON MICROSCOPY;
SENSORS;
SPATIAL VARIABLES MEASUREMENT;
VIDEO CAMERAS;
MOBILE ROBOTS;
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EID: 0035556560
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (6)
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