Towards minimum k values of porous dielectrics: A simulation study

Advanced Metallization Conference (AMC)

Volumn , Issue , 2001, Pages 393-397

  Steinhögl, Werner ^a   Schindler, G ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELECTRIC FIELDS; POROUS MATERIALS; VOLUME FRACTION;

POROUS DIELECTRICS;

DIELECTRIC MATERIALS;

EID: 0035555407     PISSN: 10480854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)