Simulations of local heating in VLSI backend structures using Atar

Advanced Metallization Conference (AMC)

Volumn , Issue , 2001, Pages 355-361

  Smy, T ^a   Walkey, D ^a   Shams, M ^a   Joshi, R V ^a  

^a CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; HEAT TRANSFER; HEATING; SILICON; SILICON ON INSULATOR TECHNOLOGY; SIMULATORS;

LOCAL HEATING;

VLSI CIRCUITS;

EID: 0035554944     PISSN: 10480854     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)